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揮発性化学物質を低減した塗料の開発

若山 恵英*1・鹿毛 俊彦*1・久保田 浩*1・並木 哲*1

居住中の住居や稼動中の半導体工場などの改修工事では,短期間で施工可能な塗装が求められる共に工事終了後に塗装臭気が残留しないことが必要とされている。本研究は,居住中の住居や稼動中の半導体工場などの改修工事に適応可能な,塗装直後の揮発性有機化合物を低減した塗料開発を行い,開発塗料および半導体工場での使用実績が多い市販品エポキシ塗料の揮発性有機化合物放散量,アンモニア放散量,シリコンウェハ汚染度の評価を行った。
開発塗料は塗装直後からの揮発性化学物質の発生量が従来の市販品と比較して少なく,シリコンウェハへの汚染度も小さいことが分かった。

キーワード:  塗料,揮発性有機化合物,クリーンルーム,改修,シリコンウェハ

*1 技術センター 建築技術研究所 建築構工法研究室

Development of Paints with Reduced Volatile Chemical Compound Emissions

Yoshihide WAKAYAMA *1, Toshihiko KAGE *1, Hiroshi KUBOTA *1 and Satoru NAMIKI *1

When renovations are carried out on buildings such as semiconductor device factories or residential properties while they remain in use, there is a need for quick-curing paints. Moreover, paint smells should not to remain after work finishes; the ideal paint for redecoration work should leave little residual smell. In this research, paints are developed that have reduced emissions of volatile organic compounds immediately after painting and so are suitable for semiconductor cleanrooms and inhabited dwellings. Emissions of volatile organic compounds and ammonia as well as the level of surface pollution on silicon wafers are evaluated for the newly developed paints.

Keywords:  paint, volatile organic compounds, cleanroom, renovation, silicon wafer

*1 Building System and Material Research Section, Building Engineering Research Institute, Technology Center